JPH0212513Y2 - - Google Patents
Info
- Publication number
- JPH0212513Y2 JPH0212513Y2 JP18955284U JP18955284U JPH0212513Y2 JP H0212513 Y2 JPH0212513 Y2 JP H0212513Y2 JP 18955284 U JP18955284 U JP 18955284U JP 18955284 U JP18955284 U JP 18955284U JP H0212513 Y2 JPH0212513 Y2 JP H0212513Y2
- Authority
- JP
- Japan
- Prior art keywords
- opening
- clean room
- air
- room
- articles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 235000009508 confectionery Nutrition 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18955284U JPH0212513Y2 (en]) | 1984-12-15 | 1984-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18955284U JPH0212513Y2 (en]) | 1984-12-15 | 1984-12-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61104132U JPS61104132U (en]) | 1986-07-02 |
| JPH0212513Y2 true JPH0212513Y2 (en]) | 1990-04-09 |
Family
ID=30746998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18955284U Expired JPH0212513Y2 (en]) | 1984-12-15 | 1984-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0212513Y2 (en]) |
-
1984
- 1984-12-15 JP JP18955284U patent/JPH0212513Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61104132U (en]) | 1986-07-02 |
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